Jolanta-Ewa Sapieha
, Ludvik Martinu, Michael R. Wertheimer, P. Günther, R. Schellin, C. Thielemann and G. M. Sessler
Article (1996)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/31171/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 14, no. 5) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.580199 |
| Official URL: | https://doi.org/10.1116/1.580199 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 08 Apr 2025 06:51 |
| Cite in APA 7: | Sapieha, J.-E., Martinu, L., Wertheimer, M. R., Günther, P., Schellin, R., Thielemann, C., & Sessler, G. M. (1996). Plasma deposition of low-stress electret films for electroacoustic and solar cell applications. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 14(5), 2775-2779. https://doi.org/10.1116/1.580199 |
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