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Plasma deposition of low-stress electret films for electroacoustic and solar cell applications

Jolanta-Ewa Sapieha, Ludvik Martinu, Michael R. Wertheimer, P. Günther, R. Schellin, C. Thielemann and G. M. Sessler

Article (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31171/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 14, no. 5)
Publisher: American Vacuum Society
DOI: 10.1116/1.580199
Official URL: https://doi.org/10.1116/1.580199
Date Deposited: 18 Apr 2023 15:24
Last Modified: 06 May 2024 16:56
Cite in APA 7: Sapieha, J.-E., Martinu, L., Wertheimer, M. R., Günther, P., Schellin, R., Thielemann, C., & Sessler, G. M. (1996). Plasma deposition of low-stress electret films for electroacoustic and solar cell applications. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 14(5), 2775-2779. https://doi.org/10.1116/1.580199

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