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Interphase characterization of PECVD silicon-compound layers on PET

A. S. da Silva Sobrinho, A. Bergeron, N. Schuhler, Jolanta-Ewa Sapieha, Ludvik Martinu, Michael R. Wertheimer and M. Andrews

Paper (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29748/
Conference Title: 41st Annual Technical Conference
Conference Location: Boston, MA, USA
Conference Date(s): 1998-04-18 - 1998-04-23
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: da Silva Sobrinho, A. S., Bergeron, A., Schuhler, N., Sapieha, J.-E., Martinu, L., Wertheimer, M. R., & Andrews, M. (1998, April). Interphase characterization of PECVD silicon-compound layers on PET [Paper]. 41st Annual Technical Conference, Boston, MA, USA.

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