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Metallic contamination from wafer handling

Félix Beaudoin, Martine Simard-Normandin and Michel Meunier

Paper (1997)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29137/
Conference Title: Advanced Workshop on Silicon Recombination Lifetime Characterization Methods
Conference Location: Santa Clara, CA, USA
Conference Date(s): 1997-06-02 - 1997-06-03
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:17
Cite in APA 7: Beaudoin, F., Simard-Normandin, M., & Meunier, M. (1997, June). Metallic contamination from wafer handling [Paper]. Advanced Workshop on Silicon Recombination Lifetime Characterization Methods, Santa Clara, CA, USA.

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