<  Back to the Polytechnique Montréal portal

Interphase in Plasma-Deposited Silicon Nitride Optical Films on Polycarbonate: in Situ Ellipsometric Characterization

A. Bergeron, D. Poitras and Ludvik Martinu

Article (2000)

An external link is available for this item
Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28353/
Journal Title: Optical Engineering (vol. 39, no. 3)
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/1.602433
Official URL: https://doi.org/10.1117/1.602433
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Bergeron, A., Poitras, D., & Martinu, L. (2000). Interphase in Plasma-Deposited Silicon Nitride Optical Films on Polycarbonate: in Situ Ellipsometric Characterization. Optical Engineering, 39(3), 825-831. https://doi.org/10.1117/1.602433

Statistics

Dimensions

Repository Staff Only

View Item View Item