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Photoluminescence Characterization of Si-Based Nanostructured Films Produced by Pulsed Laser Ablation

A. V. Kabashin, Michel Meunier and R. Leonelli

Article (2001)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27310/
Journal Title: Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (vol. 19, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.1420494
Official URL: https://doi.org/10.1116/1.1420494
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:14
Cite in APA 7: Kabashin, A. V., Meunier, M., & Leonelli, R. (2001). Photoluminescence Characterization of Si-Based Nanostructured Films Produced by Pulsed Laser Ablation. Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 19(6), 2217-2222. https://doi.org/10.1116/1.1420494

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