Photoluminescence Characterization of Si-Based Nanostructured Films Produced by Pulsed Laser Ablation

A. V. Kabashin, Michel Meunier et R. Leonelli

Article de revue (2001)

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Département:	Département de génie physique
URL de PolyPublie:	https://publications.polymtl.ca/27310/
Titre de la revue:	Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (vol. 19, no 6)
Maison d'édition:	American Vacuum Society
DOI:	10.1116/1.1420494
URL officielle:	https://doi.org/10.1116/1.1420494
Date du dépôt:	18 avr. 2023 15:21
Dernière modification:	05 avr. 2024 11:14

Citer en APA 7:	Kabashin, A. V., Meunier, M., & Leonelli, R. (2001). Photoluminescence Characterization of Si-Based Nanostructured Films Produced by Pulsed Laser Ablation. Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 19(6), 2217-2222. https://doi.org/10.1116/1.1420494
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