P. Cova, Rémo A. Masut
, Olivier Grenier and Suzie Poulin
Article (2002)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/26715/ |
| Journal Title: | Journal of Applied Physics (vol. 92, no. 1) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.1483902 |
| Official URL: | https://doi.org/10.1063/1.1483902 |
| Date Deposited: | 18 Apr 2023 15:20 |
| Last Modified: | 08 Apr 2025 02:15 |
| Cite in APA 7: | Cova, P., Masut, R. A., Grenier, O., & Poulin, S. (2002). Effect of unintentionally introduced oxygen on the electron-cyclotron resonance chemical-vapor deposition of SiNₓ films. Journal of Applied Physics, 92(1), 129-138. https://doi.org/10.1063/1.1483902 |
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