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Développement et caractérisation d'un procédé de fabrication 0.8 micron CMOS sur substrat SOI

Stéphane Martel

Master's thesis (2002)

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Department: Department of Engineering Physics
Academic/Research Directors: Arthur Yelon and Michel Meunier
PolyPublie URL: https://publications.polymtl.ca/26445/
Institution: École Polytechnique de Montréal
Date Deposited: 18 Apr 2023 15:20
Last Modified: 18 Apr 2023 15:20
Cite in APA 7: Martel, S. (2002). Développement et caractérisation d'un procédé de fabrication 0.8 micron CMOS sur substrat SOI [Master's thesis, École Polytechnique de Montréal].

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