Stéphane Larouche, Hieronim Szymanowski, Jolanta-Ewa Sapieha
, Ludvik Martinu and Subhash C. Gujrathi
Article (2004)
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| Department: | Department of Engineering Physics |
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| Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
| PolyPublie URL: | https://publications.polymtl.ca/24871/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 22, no. 4) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.1763912 |
| Official URL: | https://doi.org/10.1116/1.1763912 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 26 Sep 2024 11:52 |
| Cite in APA 7: | Larouche, S., Szymanowski, H., Sapieha, J.-E., Martinu, L., & Gujrathi, S. C. (2004). Microstructure of plasma-deposited SiO₂/TiO₂ optical films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(4), 1200-1207. https://doi.org/10.1116/1.1763912 |
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