<  Back to the Polytechnique Montréal portal

Microstructure of plasma-deposited SiO₂/TiO₂ optical films

S. Larouche, H. Szymanowski, Jolanta-Ewa Sapieha, Ludvik Martinu and S. C. Gujrathi

Article (2004)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24871/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 22, no. 4)
Publisher: American Vacuum Society
DOI: 10.1116/1.1763912
Official URL: https://doi.org/10.1116/1.1763912
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Larouche, S., Szymanowski, H., Sapieha, J.-E., Martinu, L., & Gujrathi, S. C. (2004). Microstructure of plasma-deposited SiO₂/TiO₂ optical films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(4), 1200-1207. https://doi.org/10.1116/1.1763912

Statistics

Dimensions

Repository Staff Only

View Item View Item