Stéphane Larouche, Hieronim Szymanowski, Jolanta-Ewa Sapieha
, Ludvik Martinu, Subhash C. Gujrathi
Article (2004)
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Journal Title
:
Journal of vacuum science and technology. A, Vacuum, surfaces, and films
(
vol.
22
,
no.
4
)
Publisher:
American Vacuum Society
DOI:
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OAI:
oai:publications.polymtl.ca:24871
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Date Deposited:
18 Apr 2023 15:19
Last Modified:
08 Oct 2026 17:25
Cite in APA 7:
Larouche, S., Szymanowski, H., Sapieha, J.-E., Martinu, L., & Gujrathi, S. C. (2004). Microstructure of plasma-deposited SiO₂/TiO₂ optical films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(4), 1200-1207. https://doi.org/10.1116/1.1763912
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