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Influence of ambient medium on femtosecond laser processing of silicon

S. Besner, Jean-Yves Degorce, Andrei Kabashin and Michel Meunier

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24383/
Conference Title: European Materials Research Society 2004 - Symposium N
Conference Location: Strasbourg, France
Conference Date(s): 2004-05-24 - 2004-05-28
Journal Title: Applied Surface Science (vol. 247, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/j.apsusc.2005.01.137
Official URL: https://doi.org/10.1016/j.apsusc.2005.01.137
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Besner, S., Degorce, J.-Y., Kabashin, A., & Meunier, M. (2004, May). Influence of ambient medium on femtosecond laser processing of silicon [Paper]. European Materials Research Society 2004 - Symposium N, Strasbourg, France. Published in Applied Surface Science, 247(1-4). https://doi.org/10.1016/j.apsusc.2005.01.137

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