Jean-Numa Gillet, Jean-Yves Degorce and Michel Meunier
Article (2005)
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| Department: | Department of Engineering Physics |
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| Funders: | NSERC/CRSNG |
| PolyPublie URL: | https://publications.polymtl.ca/24118/ |
| Journal Title: | Applied Physics Letters (vol. 86, no. 22) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.1927275 |
| Official URL: | https://doi.org/10.1063/1.1927275 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:03 |
| Cite in APA 7: | Gillet, J.-N., Degorce, J.-Y., & Meunier, M. (2005). General Model and Segregation Coefficient Measurement for Ultrashallow Doping by Excimer Laser Annealing. Applied Physics Letters, 86(22). https://doi.org/10.1063/1.1927275 |
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