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General Model and Segregation Coefficient Measurement for Ultrashallow Doping by Excimer Laser Annealing

Jean-Numa Gillet, Jean-Yves Degorce and Michel Meunier

Article (2005)

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Department: Department of Engineering Physics
Funders: NSERC/CRSNG
PolyPublie URL: https://publications.polymtl.ca/24118/
Journal Title: Applied Physics Letters (vol. 86, no. 22)
Publisher: American Institute of Physics
DOI: 10.1063/1.1927275
Official URL: https://doi.org/10.1063/1.1927275
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:09
Cite in APA 7: Gillet, J.-N., Degorce, J.-Y., & Meunier, M. (2005). General Model and Segregation Coefficient Measurement for Ultrashallow Doping by Excimer Laser Annealing. Applied Physics Letters, 86(22). https://doi.org/10.1063/1.1927275

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