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Ion-induced effects during reactive sputtering of ITO films

O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Paper (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23515/
Conference Title: 48th Society of Vacuum Coaters Technical Conference
Conference Location: Denver, Colorado
Conference Date(s): 2005-04-23 - 2005-04-28
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Zabeida, O., Sapieha, J.-E., & Martinu, L. (2005, April). Ion-induced effects during reactive sputtering of ITO films [Paper]. 48th Society of Vacuum Coaters Technical Conference, Denver, Colorado. https://www.svc.org/clientuploads/directory/resource_library/05_192.pdf

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