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Room temperature air oxidation of nanostructured Si thin films with varying porosities as studied by X-ray photoelectron spectroscopy

D.-Q. Yang, Michel Meunier and Edward Sacher

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22383/
Journal Title: Journal of Applied Physics (vol. 99, no. 8)
Publisher: American Institute of Physics
DOI: 10.1063/1.2193168
Official URL: https://doi.org/10.1063/1.2193168
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Yang, D.-Q., Meunier, M., & Sacher, E. (2006). Room temperature air oxidation of nanostructured Si thin films with varying porosities as studied by X-ray photoelectron spectroscopy. Journal of Applied Physics, 99(8), 084315-1-084315-6. https://doi.org/10.1063/1.2193168

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