Room temperature air oxidation of nanostructured Si thin films with varying porosities as studied by X-ray photoelectron spectroscopy

D.-Q. Yang, Michel Meunier and Edward Sacher

Article (2006)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/22383/
Journal Title:	Journal of Applied Physics (vol. 99, no. 8)
Publisher:	American Institute of Physics
DOI:	10.1063/1.2193168
Official URL:	https://doi.org/10.1063/1.2193168
Date Deposited:	18 Apr 2023 15:18
Last Modified:	25 Sep 2024 16:01

Cite in APA 7:	Yang, D.-Q., Meunier, M., & Sacher, E. (2006). Room temperature air oxidation of nanostructured Si thin films with varying porosities as studied by X-ray photoelectron spectroscopy. Journal of Applied Physics, 99(8), 084315-1-084315-6. https://doi.org/10.1063/1.2193168
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