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Optical and Chemical Characterization of Expanding Thermal Plasma-Deposited Carbon-Containing Silicon Dioxide-Like Films

M. Creatore, S. M. Rieter, Y. Barrell, M. C. M. Van De Sanden, R. Vernhes and Ludvik Martinu

Article (2008)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20918/
Journal Title: Thin Solid Films (vol. 516, no. 23)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2008.05.022
Official URL: https://doi.org/10.1016/j.tsf.2008.05.022
Date Deposited: 18 Apr 2023 15:15
Last Modified: 05 Apr 2024 11:04
Cite in APA 7: Creatore, M., Rieter, S. M., Barrell, Y., Van De Sanden, M. C. M., Vernhes, R., & Martinu, L. (2008). Optical and Chemical Characterization of Expanding Thermal Plasma-Deposited Carbon-Containing Silicon Dioxide-Like Films. Thin Solid Films, 516(23), 8547-8553. https://doi.org/10.1016/j.tsf.2008.05.022

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