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High Precision ANN-based Adaptive Displacement Tracking of Piezoelectric Actuators for MEMS

Hicham Chaoui, Pierre Sicard and Mohamad Sawan

Paper (2010)

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Department: Department of Electrical Engineering
Research Center: ResMIQ - Regroupement stratégique en microsystèmes du Québec
PolyPublie URL: https://publications.polymtl.ca/18522/
Conference Title: 8th IEEE International NEWCAS Conference (NEWCAS 2010)
Conference Location: Montréal, Québec
Conference Date(s): 2010-06-20 - 2010-06-23
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/newcas.2010.5603710
Official URL: https://doi.org/10.1109/newcas.2010.5603710
Date Deposited: 18 Apr 2023 15:13
Last Modified: 27 Sep 2024 14:29
Cite in APA 7: Chaoui, H., Sicard, P., & Sawan, M. (2010, June). High Precision ANN-based Adaptive Displacement Tracking of Piezoelectric Actuators for MEMS [Paper]. 8th IEEE International NEWCAS Conference (NEWCAS 2010), Montréal, Québec. https://doi.org/10.1109/newcas.2010.5603710

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