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Micromachining by CO₂ laser ablation: building blocks for a multiport integrated device

G. V. Vazquez, A. Harhira, Raman Kashyap and Rénato Bosisio

Article (2010)

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Department: Department of Electrical Engineering
Research Center: GR2M - Microelectronics and Microsystems Research Group
PolyPublie URL: https://publications.polymtl.ca/17480/
Journal Title: Optics Communications (vol. 283, no. 14)
Publisher: Elsevier
DOI: 10.1016/j.optcom.2010.03.047
Official URL: https://doi.org/10.1016/j.optcom.2010.03.047
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 10:59
Cite in APA 7: Vazquez, G. V., Harhira, A., Kashyap, R., & Bosisio, R. (2010). Micromachining by CO₂ laser ablation: building blocks for a multiport integrated device. Optics Communications, 283(14), 2824-2828. https://doi.org/10.1016/j.optcom.2010.03.047

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