Documents publiés en "2023"

Département de génie physique

Snyders, R., Hegemann, D., Thiry, D., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2023). Foundations of plasma enhanced chemical vapor deposition of functional coatings. Plasma Sources Science and Technology, 32(7), 36 pages. Disponible