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Hassani, S., Li, D., Martinu, L., & Sapieha, J.-E. (2023). Highly elastic hard PECVD TiSiC:H/a-SiC:H coatings with enhanced erosion and corrosion resistance: The trampoline effect. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(4), 11 pages. Lien externe