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Highly elastic hard PECVD TiSiC:H/a-SiC:H coatings with enhanced erosion and corrosion resistance: The trampoline effect

S. Hassani, D. Li, Ludvik Martinu and Jolanta-Ewa Sapieha

Article (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/54658/
Journal Title: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (vol. 41, no. 4)
Publisher: AVS Science and Technology Society
DOI: 10.1116/6.0002423
Official URL: https://doi.org/10.1116/6.0002423
Date Deposited: 29 Aug 2023 14:10
Last Modified: 05 Apr 2024 12:01
Cite in APA 7: Hassani, S., Li, D., Martinu, L., & Sapieha, J.-E. (2023). Highly elastic hard PECVD TiSiC:H/a-SiC:H coatings with enhanced erosion and corrosion resistance: The trampoline effect. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(4), 11 pages. https://doi.org/10.1116/6.0002423

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