S. Hassani, D. Li, Ludvik Martinu
and Jolanta-Ewa Sapieha
Article (2023)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/54658/ |
| Journal Title: | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (vol. 41, no. 4) |
| Publisher: | AVS Science and Technology Society |
| DOI: | 10.1116/6.0002423 |
| Official URL: | https://doi.org/10.1116/6.0002423 |
| Date Deposited: | 29 Aug 2023 14:10 |
| Last Modified: | 25 Sep 2024 16:46 |
| Cite in APA 7: | Hassani, S., Li, D., Martinu, L., & Sapieha, J.-E. (2023). Highly elastic hard PECVD TiSiC:H/a-SiC:H coatings with enhanced erosion and corrosion resistance: The trampoline effect. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(4), 11 pages. https://doi.org/10.1116/6.0002423 |
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