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Avila, P. R. T., Zabeida, O., Varela, L. B., Sapieha, J.-E., & Martinu, L. (2023). In-situ monitoring of stress evolution in high power impulse magnetron sputtering-deposited Ti-Al-N films: Effect of substrate bias and temperature. Thin Solid Films, 784, 140069 (13 pages). Lien externe
