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Abadias, G., Chason, E., Keckes, J., Sebastiani, M., Thompson, G. B., Barthel, E., Doll, G. L., Murray, C. E., Stoessel, C. H., & Martinu, L. (2018). Stress in thin films and coatings: current status, challenges, and prospects. Journal of Vacuum Science & Technology A, 36(2). Disponible
