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Poulin, A., St-Gelais, R., Eichenberger, A. L., Thévenaz, L., & Peter, Y.-A. (2013). MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples. Journal of Microelectromechanical Systems, 22(4), 884-891. Lien externe