Alexandre Poulin, Raphael St-Gelais, Ali L. Eichenberger, Luc Thévenaz and Yves-Alain Peter
Article (2013)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/13256/ |
| Journal Title: | Journal of Microelectromechanical Systems (vol. 22, no. 4) |
| Publisher: | IEEE |
| DOI: | 10.1109/jmems.2013.2248252 |
| Official URL: | https://doi.org/10.1109/jmems.2013.2248252 |
| Date Deposited: | 18 Apr 2023 15:10 |
| Last Modified: | 08 Apr 2025 01:40 |
| Cite in APA 7: | Poulin, A., St-Gelais, R., Eichenberger, A. L., Thévenaz, L., & Peter, Y.-A. (2013). MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples. Journal of Microelectromechanical Systems, 22(4), 884-891. https://doi.org/10.1109/jmems.2013.2248252 |
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