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MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples

Alexandre Poulin, Raphael St-Gelais, Ali L. Eichenberger, Luc Thévenaz and Yves-Alain Peter

Article (2013)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/13256/
Journal Title: Journal of Microelectromechanical Systems (vol. 22, no. 4)
Publisher: IEEE
DOI: 10.1109/jmems.2013.2248252
Official URL: https://doi.org/10.1109/jmems.2013.2248252
Date Deposited: 18 Apr 2023 15:10
Last Modified: 08 May 2024 14:05
Cite in APA 7: Poulin, A., St-Gelais, R., Eichenberger, A. L., Thévenaz, L., & Peter, Y.-A. (2013). MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples. Journal of Microelectromechanical Systems, 22(4), 884-891. https://doi.org/10.1109/jmems.2013.2248252

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