Documents publiés en "2012"

Département de génie physique

Zandi, K., Belanger, J. A., & Peter, Y.-A. (2012). Design and demonstration of an in-plane silicon-on-insulator optical MEMS fabry-perot-based accelerometer integrated with channel waveguides. Journal of Microelectromechanical Systems, 21(6), 1464-1470. Lien externe