Design and demonstration of an in-plane silicon-on-insulator optical MEMS fabry-perot-based accelerometer integrated with channel waveguides

Kazem Zandi, Joseph Andre Belanger and Yves-Alain Peter

Article (2012)

An external link is available for this item

Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/14436/
Journal Title:	Journal of Microelectromechanical Systems (vol. 21, no. 6)
Publisher:	IEEE
DOI:	10.1109/jmems.2012.2211577
Official URL:	https://doi.org/10.1109/jmems.2012.2211577
Date Deposited:	18 Apr 2023 15:11
Last Modified:	08 Apr 2025 01:41

Cite in APA 7:	Zandi, K., Belanger, J. A., & Peter, Y.-A. (2012). Design and demonstration of an in-plane silicon-on-insulator optical MEMS fabry-perot-based accelerometer integrated with channel waveguides. Journal of Microelectromechanical Systems, 21(6), 1464-1470. https://doi.org/10.1109/jmems.2012.2211577
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Dimensions

Repository Staff Only

View Item