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Design and demonstration of an in-plane silicon-on-insulator optical MEMS fabry-perot-based accelerometer integrated with channel waveguides

Kazem Zandi, Joseph Andre Belanger and Yves-Alain Peter

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/14436/
Journal Title: Journal of Microelectromechanical Systems (vol. 21, no. 6)
Publisher: IEEE
DOI: 10.1109/jmems.2012.2211577
Official URL: https://doi.org/10.1109/jmems.2012.2211577
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 10:54
Cite in APA 7: Zandi, K., Belanger, J. A., & Peter, Y.-A. (2012). Design and demonstration of an in-plane silicon-on-insulator optical MEMS fabry-perot-based accelerometer integrated with channel waveguides. Journal of Microelectromechanical Systems, 21(6), 1464-1470. https://doi.org/10.1109/jmems.2012.2211577

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