Macqueen, L. A., Zikovsky, J., Dennler, G., Latreche, M., Czeremuszkin, G., & Wertheimer, M. R. (2006). Pecvd of Nanocrystalline Si Layers on High-Tg Polymer Substrates. Plasma Processes and Polymers, 3(1), 58-65. Lien externe