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Pecvd of Nanocrystalline Si Layers on High-Tg Polymer Substrates

L. A. Macqueen, J. Zikovsky, G. Dennler, M. Latreche, G. Czeremuszkin and Michael R. Wertheimer

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22800/
Journal Title: Plasma Processes and Polymers (vol. 3, no. 1)
Publisher: Wiley
DOI: 10.1002/ppap.200500145
Official URL: https://doi.org/10.1002/ppap.200500145
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Macqueen, L. A., Zikovsky, J., Dennler, G., Latreche, M., Czeremuszkin, G., & Wertheimer, M. R. (2006). Pecvd of Nanocrystalline Si Layers on High-Tg Polymer Substrates. Plasma Processes and Polymers, 3(1), 58-65. https://doi.org/10.1002/ppap.200500145

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