 | Monter d'un niveau |
Wróbel, A. M., Blaszczyk, I., Walkiewicz-Pietrzykowska, A., Tracz, A., Sapieha, J.-E., Aoki, T., & Hatanaka, Y. (2003). Remote Hydrogen-Nitrogen Plasma Chemical Vapor Deposition From a Tetramethyldisilazane Source. Part 1. Mechanism of the Process, Structure and Surface Morphology of Deposited Amorphous Hydrogenated Silicon Carbonitride Films. Journal of Materials Chemistry, 13(4), 731-737. Lien externe
Wróbel, A. M., Walkiewicz-Pietrzykowska, A., Bielinski, D. M., Sapieha, J.-E., Nakanishi, Y., Aoki, T., & Hatanaka, Y. (2003). Remote Hydrogen Plasma Chemical Vapor Deposition From (Dimethylsilyl)(Trimethylsilyl)Methane. 2. Property-Structure Relationships for Resulting Silicon-Carbon Films. Chemistry of Materials, 15(8), 1757-1762. Lien externe
Wróbel, A. M., Walkiewicz-Pietrzykowska, A., Sapieha, J.-E., Nakanishi, Y., Aoki, T., & Hatanaka, Y. (2003). Remote Hydrogen Plasma Chemical Vapor Deposition From (Dimethylsilyl)(Trimethylsilyl)Methane. 1. Kinetics of the Process; Chemical and Morphological Structure of Deposited Silicon-Carbon Films. Chemistry of Materials, 15(8), 1749-1756. Lien externe
