Documents publiés en "2001"

Département de génie physique

Raveh, A., Danon, A., Hayon, J., Rubinshtein, A., Shneck, R., Sapieha, J.-E., & Martinu, L. (2001). Characterization of Carburized Tantalum Layers Prepared in Inductive Rf Plasma. Thin Solid Films, 392(1), 56-64. Lien externe