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Vlcek, J., Rusnak, K., Hajek, V., & Martinu, L. (mars 2000). Characterization of ion bombardment and optical emission spectroscopy in magnetron discharges for reactive sputtering of hard carbon nitride films [Résumé]. International Symposium on Trends and Applications of Thin Films (TATF 2000), Nancy, France. Publié dans Vide, 54(295 SUP1/4). Non disponible
