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Meunier, M., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (janvier 1999). Excimer laser cleaning for microelectronics : Modeling, applications and challenges [Communication écrite]. 4th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 1999), San Jose, CA, USA. Lien externe
