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Excimer laser cleaning for microelectronics : Modeling, applications and challenges

Michel Meunier, Xiaoguang Wu, Felix Beaudoin, Edward Sacher and Martine Simard-Normandin

Paper (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28742/
Conference Title: 4th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 1999)
Conference Location: San Jose, CA, USA
Conference Date(s): 1999-01-25
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.352691
Official URL: https://doi.org/10.1117/12.352691
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:17
Cite in APA 7: Meunier, M., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (1999, January). Excimer laser cleaning for microelectronics : Modeling, applications and challenges [Paper]. 4th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 1999), San Jose, CA, USA. https://doi.org/10.1117/12.352691

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