Michel Meunier
, Xiaoguang Wu, Felix Beaudoin, Edward Sacher and Martine Simard-Normandin
Paper (1999)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/28742/ |
| Conference Title: | 4th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 1999) |
| Conference Location: | San Jose, CA, USA |
| Conference Date(s): | 1999-01-25 |
| Publisher: | SPIE - International Society for Optical Engineering |
| DOI: | 10.1117/12.352691 |
| Official URL: | https://doi.org/10.1117/12.352691 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:09 |
| Cite in APA 7: | Meunier, M., Wu, X., Beaudoin, F., Sacher, E., & Simard-Normandin, M. (1999, January). Excimer laser cleaning for microelectronics : Modeling, applications and challenges [Paper]. 4th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 1999), San Jose, CA, USA. https://doi.org/10.1117/12.352691 |
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