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Caron, M., Gagnon, G., Fortin, V., Currie, J. F., Ouellet, L., Tremblay, Y., Biberger, M., & Reynolds, R. (1996). Calculation of a Al-Ti-O-N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization. Journal of Applied Physics, 79(8), 4468-4470. Lien externe
