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Calculation of a Al-Ti-O-N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization

Mario Caron, Gilles Gagnon, Vincent Fortin, John F. Currie, Luc Ouellet, Yves Tremblay, Max Biberger and Reese Reynolds

Article (1996)

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Additional Information: Nom historique du département: Département de métallurgie et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31445/
Journal Title: Journal of Applied Physics (vol. 79, no. 8)
Publisher: American Institute of Physics
DOI: 10.1063/1.361760
Official URL: https://doi.org/10.1063/1.361760
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Caron, M., Gagnon, G., Fortin, V., Currie, J. F., Ouellet, L., Tremblay, Y., Biberger, M., & Reynolds, R. (1996). Calculation of a Al-Ti-O-N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization. Journal of Applied Physics, 79(8), 4468-4470. https://doi.org/10.1063/1.361760

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