Mario Caron, Gilles Gagnon, Vincent Fortin, John F. Currie, Luc Ouellet, Yves Tremblay, Max Biberger and Reese Reynolds
Article (1996)
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| Additional Information: | Nom historique du département: Département de métallurgie et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/31445/ |
| Journal Title: | Journal of Applied Physics (vol. 79, no. 8) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.361760 |
| Official URL: | https://doi.org/10.1063/1.361760 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:13 |
| Cite in APA 7: | Caron, M., Gagnon, G., Fortin, V., Currie, J. F., Ouellet, L., Tremblay, Y., Biberger, M., & Reynolds, R. (1996). Calculation of a Al-Ti-O-N quaternary isotherm diagram for the prediction of stable phases in TiN/Al alloy contact metallization. Journal of Applied Physics, 79(8), 4468-4470. https://doi.org/10.1063/1.361760 |
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