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Meyyappan, M., McLane, G. F., Cole, M. W., Laraeu, R., Namaroff, M., Sasserath, J. N., & Sundararaman, C. S. (1992). Magnetron etching of GaAs: Etch characteristics and surface characterization. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 10(4), 1147-1151. Lien externe
