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Moisan, M., Barbeau, C., Claude, R., Ferreira, C. M., Margot, J., Paraszczak, J., Sá, A. B., Sauvé, G., & Wertheimer, M. R. (1991). Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 9(1), 8-25. Lien externe
