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Paquin, L., Masson, D., Wertheimer, M. R., & Moisan, M. (1985). Amorphous silicon for photovoltaics produced by new microwave plasma-deposition techniques. Canadian Journal of Physics, 63(6), 831-837. Lien externe
Wertheimer, M. R., & Moisan, M. (1985). Comparison of microwave and lower frequency plasmas for thin film deposition and etching. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 3(6), 2643-2649. Lien externe
