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Tormen, M., Peter, Y.-A., Niedermann, P., Hoogerwerf, A., Shea, H., & Stanley, R. (2006, January). Deformable MEMS grating for wide tunability and high-operating speed [Paper]. MOEMS, Display, Imaging, and Miniaturized Microsystems IV, part of Photonics West 2006, San Jose, CA. External link