Maurizio Tormen, Yves-Alain Peter
, Philippe Niedermann, Arno Hoogerwerf, Herbert Shea and Ross Stanley
Paper (2006)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/22444/ |
| Conference Title: | MOEMS, Display, Imaging, and Miniaturized Microsystems IV, part of Photonics West 2006 |
| Conference Location: | San Jose, CA |
| Conference Date(s): | 2006-01-25 - 2006-01-26 |
| Publisher: | SPIE - International Society for Optical Engineering |
| DOI: | 10.1117/12.644523 |
| Official URL: | https://doi.org/10.1117/12.644523 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:01 |
| Cite in APA 7: | Tormen, M., Peter, Y.-A., Niedermann, P., Hoogerwerf, A., Shea, H., & Stanley, R. (2006, January). Deformable MEMS grating for wide tunability and high-operating speed [Paper]. MOEMS, Display, Imaging, and Miniaturized Microsystems IV, part of Photonics West 2006, San Jose, CA. https://doi.org/10.1117/12.644523 |
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