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Items where Author is "Song, I. H."

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Song, I. H., Peter, Y.-A., & Meunier, M. (2007). Smoothing Dry-Etched Microstructure Sidewalls Using Focused Ion Beam Milling for Optical Applications. Journal of Micromechanics and Microengineering, 17(8), 1593-1597. External link

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