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Smoothing Dry-Etched Microstructure Sidewalls Using Focused Ion Beam Milling for Optical Applications

I. H. Song, Yves-Alain Peter and Michel Meunier

Article (2007)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/21391/
Journal Title: Journal of Micromechanics and Microengineering (vol. 17, no. 8)
Publisher: IOP Publishing
DOI: 10.1088/0960-1317/17/8/023
Official URL: https://doi.org/10.1088/0960-1317/17/8/023
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:05
Cite in APA 7: Song, I. H., Peter, Y.-A., & Meunier, M. (2007). Smoothing Dry-Etched Microstructure Sidewalls Using Focused Ion Beam Milling for Optical Applications. Journal of Micromechanics and Microengineering, 17(8), 1593-1597. https://doi.org/10.1088/0960-1317/17/8/023

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