Smoothing Dry-Etched Microstructure Sidewalls Using Focused Ion Beam Milling for Optical Applications

I. H. Song, Yves-Alain Peter and Michel Meunier

Article (2007)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/21391/
Journal Title:	Journal of Micromechanics and Microengineering (vol. 17, no. 8)
Publisher:	IOP Publishing
DOI:	10.1088/0960-1317/17/8/023
Official URL:	https://doi.org/10.1088/0960-1317/17/8/023
Date Deposited:	18 Apr 2023 15:17
Last Modified:	08 Apr 2025 02:08

Cite in APA 7:	Song, I. H., Peter, Y.-A., & Meunier, M. (2007). Smoothing Dry-Etched Microstructure Sidewalls Using Focused Ion Beam Milling for Optical Applications. Journal of Micromechanics and Microengineering, 17(8), 1593-1597. https://doi.org/10.1088/0960-1317/17/8/023
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