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Naseh, S., Landsberger, L. M., Paranjape, M., Nikpour, B., Kahrizi, M., Antaki, R., & Currie, J. F. (1996, May). Release-control structure for post-process release of a micromachined cantilever [Paper]. Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century, Calgary, Can. External link