S. Naseh, L. M. Landsberger, M. Paranjape, B. Nikpour, M. Kahrizi, R. Antaki and John F. Currie
Paper (1996)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/31011/ |
| Conference Title: | Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century |
| Conference Location: | Calgary, AB, Canada |
| Conference Date(s): | 1996-05-26 - 1996-05-29 |
| Publisher: | Institute of Electrical and Electronics Engineers |
| DOI: | 10.1109/ccece.1996.548043 |
| Official URL: | https://doi.org/10.1109/ccece.1996.548043 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:12 |
| Cite in APA 7: | Naseh, S., Landsberger, L. M., Paranjape, M., Nikpour, B., Kahrizi, M., Antaki, R., & Currie, J. F. (1996, May). Release-control structure for post-process release of a micromachined cantilever [Paper]. Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century, Calgary, AB, Canada. https://doi.org/10.1109/ccece.1996.548043 |
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