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Zandi, K., Wong, B., Zou, J., Kruzelecky, R. V., Jamroz, W., & Peter, Y.-A. (janvier 2010). In-plane silicon-on-insulator optical MEMS accelerometer using waveguide Fabry-Perot microcavity with silicon/air Bragg mirrors [Communication écrite]. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong. Lien externe
