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In-plane silicon-on-insulator optical MEMS accelerometer using waveguide Fabry-Perot microcavity with silicon/air Bragg mirrors

Kazem Zandi, Brian Wong, Jing Zou, Roman V. Kruzelecky, Wes Jamroz and Yves-Alain Peter

Paper (2010)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/17413/
Conference Title: 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010)
Conference Location: Hong Kong
Conference Date(s): 2010-01-24 - 2010-01-28
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/memsys.2010.5442337
Official URL: https://doi.org/10.1109/memsys.2010.5442337
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 10:59
Cite in APA 7: Zandi, K., Wong, B., Zou, J., Kruzelecky, R. V., Jamroz, W., & Peter, Y.-A. (2010, January). In-plane silicon-on-insulator optical MEMS accelerometer using waveguide Fabry-Perot microcavity with silicon/air Bragg mirrors [Paper]. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong. https://doi.org/10.1109/memsys.2010.5442337

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