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Sapieha, J.-E., Martinu, L., Wertheimer, M. R., Gunther, P., Schellin, R., Thielemann, C., & Sessler, G. M. (1996). Plasma deposition of low-stress electret films for electroacoustic and solar cell applications. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 14(5), 2775-2779. Lien externe
