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Items where Author is "Antaki, R."

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Number of items: 2.

Article

Leclerc, S., Antaki, R., & Currie, J. F. (1998). Novel Simple and Complementary Metal-Oxide-Semiconductor- Compatible Membrane Release Design and Process for Thermal Sensors. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(2), 876-880. External link

Paper

Naseh, S., Landsberger, L. M., Paranjape, M., Nikpour, B., Kahrizi, M., Antaki, R., & Currie, J. F. (1996, May). Release-control structure for post-process release of a micromachined cantilever [Paper]. Canadian Conference on Electrical and Computer Engineering : Glimpse into the 21st century, Calgary, AB, Canada. External link

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