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Items where Author is "Antaki, R."

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Jump to: 1998
Number of items: 1.

1998

Leclerc, S., Antaki, R., & Currie, J. F. (1998). Novel Simple and Complementary Metal-Oxide-Semiconductor- Compatible Membrane Release Design and Process for Thermal Sensors. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(2), 876-880. External link

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