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Nanostructural characterisation and optical properties of sputter-deposited thick indium tin oxide (ITO) coatings

Andrius Subacius, Bill Baloukas, Étienne Bousser, Steve J. Hinder, Mark A. Baker, Claus Rebholz and Allan Matthews

Article (2020)

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Indium tin oxide (ITO) thin films, used in many optoelectronic applications, are typically grown to a thickness of a maximum of a few hundred nanometres. In this work, the composition, microstructure and optical/electrical properties of thick ITO coatings deposited by radio frequency magnetron sputtering from a ceramic ITO target in an Ar/O₂ gas mixture (total O₂ flow of 1%) on unheated glass substrates are reported for the first time. In contrast to the commonly observed (200) or (400) preferential orientations in ITO thin films, the approximately 3.3 µm thick coatings display a (622) preferential orientation. The ITO coatings exhibit a purely nanocrystalline structure and show good electrical and optical properties, such as an electrical resistivity of 1.3 × 10−1 Ω·cm, optical transmittance at 550 nm of ~60% and optical band gap of 2.9 eV. The initial results presented here are expected to provide useful information for future studies on the synthesis of high-quality thick ITO coatings.

Uncontrolled Keywords

indium tin oxide; ITO; coatings; magnetron sputtering; thickness; structure; optical properties

Subjects: 3100 Physics > 3100 Physics
3100 Physics > 3101 Atomic and molecular studies
Department: Department of Engineering Physics
Funders: ERC Advanced Grant ‘IMPUNEP’ - European Research Council, University of Cyprus
Grant number: 320879
PolyPublie URL: https://publications.polymtl.ca/9377/
Journal Title: Coatings (vol. 10, no. 11)
Publisher: MDPI
DOI: 10.3390/coatings10111127
Official URL: https://doi.org/10.3390/coatings10111127
Date Deposited: 09 Feb 2023 16:50
Last Modified: 05 Apr 2024 18:57
Cite in APA 7: Subacius, A., Baloukas, B., Bousser, É., Hinder, S. J., Baker, M. A., Rebholz, C., & Matthews, A. (2020). Nanostructural characterisation and optical properties of sputter-deposited thick indium tin oxide (ITO) coatings. Coatings, 10(11), 1127 (7 pages). https://doi.org/10.3390/coatings10111127


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