Andrius Subacius, Bill Baloukas, Étienne Bousser, Steve J. Hinder, Mark A. Baker, Claus Rebholz et Allan Matthews
Article de revue (2020)
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Libre accès au plein texte de ce document Version officielle de l'éditeur Conditions d'utilisation: Creative Commons: Attribution (CC BY) Télécharger (1MB) |
Abstract
Indium tin oxide (ITO) thin films, used in many optoelectronic applications, are typically grown to a thickness of a maximum of a few hundred nanometres. In this work, the composition, microstructure and optical/electrical properties of thick ITO coatings deposited by radio frequency magnetron sputtering from a ceramic ITO target in an Ar/O₂ gas mixture (total O₂ flow of 1%) on unheated glass substrates are reported for the first time. In contrast to the commonly observed (200) or (400) preferential orientations in ITO thin films, the approximately 3.3 µm thick coatings display a (622) preferential orientation. The ITO coatings exhibit a purely nanocrystalline structure and show good electrical and optical properties, such as an electrical resistivity of 1.3 × 10−1 Ω·cm, optical transmittance at 550 nm of ~60% and optical band gap of 2.9 eV. The initial results presented here are expected to provide useful information for future studies on the synthesis of high-quality thick ITO coatings.
Mots clés
indium tin oxide; ITO; coatings; magnetron sputtering; thickness; structure; optical properties
Sujet(s): |
3100 Physique > 3100 Physique 3100 Physique > 3101 Études atomiques et moléculaires |
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Département: | Département de génie physique |
Organismes subventionnaires: | ERC Advanced Grant ‘IMPUNEP’ - European Research Council, University of Cyprus |
Numéro de subvention: | 320879 |
URL de PolyPublie: | https://publications.polymtl.ca/9377/ |
Titre de la revue: | Coatings (vol. 10, no 11) |
Maison d'édition: | MDPI |
DOI: | 10.3390/coatings10111127 |
URL officielle: | https://doi.org/10.3390/coatings10111127 |
Date du dépôt: | 09 févr. 2023 16:50 |
Dernière modification: | 05 avr. 2024 18:57 |
Citer en APA 7: | Subacius, A., Baloukas, B., Bousser, É., Hinder, S. J., Baker, M. A., Rebholz, C., & Matthews, A. (2020). Nanostructural characterisation and optical properties of sputter-deposited thick indium tin oxide (ITO) coatings. Coatings, 10(11), 1127 (7 pages). https://doi.org/10.3390/coatings10111127 |
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