Ph.D. thesis (2005)
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Plasma (Gaz ionisés); Bombardement ionique; Ellipsométrie; Spectroscopie atomique; Méthode de Monte-Carlo
| Additional Information: | Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/182040088 |
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| Department: | Department of Engineering Physics |
| Academic/Research Directors: |
Ludvik Martinu and Patrick Desjardins
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| PolyPublie URL: | https://publications.polymtl.ca/7544/ |
| Institution: | École Polytechnique de Montréal |
| Date Deposited: | 04 Aug 2021 11:05 |
| Last Modified: | 27 Sep 2024 21:43 |
| Cite in APA 7: | Amassian, A. (2005). Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/7544/ |
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