Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study

Aram Amassian

Ph.D. thesis (2005)

Open Access document in PolyPublie

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Uncontrolled Keywords

• Plasma (Gaz ionisés)
• Bombardement ionique
• Ellipsométrie
• Spectroscopie atomique
• Méthode de Monte-Carlo

Additional Information:	Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/182040088
Department:	Department of Engineering Physics
Academic/Research Directors:	Ludvik Martinu and Patrick Desjardins
ISBN:	9780494169810; 0494169818
PolyPublie URL:	https://publications.polymtl.ca/7544/
Institution:	École Polytechnique de Montréal
Date Deposited:	04 Aug 2021 11:05
Last Modified:	27 Sep 2024 21:43

Cite in APA 7:	Amassian, A. (2005). Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/7544/
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