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Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study

Aram Amassian

Ph.D. thesis (2005)

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Uncontrolled Keywords

Plasma (Gaz ionisés); Bombardement ionique; Ellipsométrie; Spectroscopie atomique; Méthode de Monte-Carlo

Additional Information: Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/182040088
Department: Department of Engineering Physics
Academic/Research Directors: Ludvik Martinu and Patrick Desjardins
PolyPublie URL: https://publications.polymtl.ca/7544/
Institution: École Polytechnique de Montréal
Date Deposited: 04 Aug 2021 11:05
Last Modified: 08 Apr 2024 10:43
Cite in APA 7: Amassian, A. (2005). Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/7544/

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