Aram Amassian
PhD thesis (2005)
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Published Version Terms of Use: All rights reserved. Download (11MB) |
| Cite this document: | Amassian, A. (2005). Ion bombardment effects in low-pressure plasmas : in situ spectroscopic ellipsometry and Monte-Carlo simulation study (PhD thesis, École Polytechnique de Montréal). Retrieved from https://publications.polymtl.ca/7544/ |
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Abstract
Ion-surface interactions -- Experimental methodology and simulation tools -- Ion-surface interactions on c-si (001) at the radiofrequency -powered electrode in low-pressure plasmas : ex-situ spectroscopic ellipsometry and Monte-Carlo simulation study -- Dynamics of ion bombardment-induced modifications of i(001) at the radiofrequency-biased electrode in low-pressure oxygen plasmas : in situ spectroscopic ellipsometry and Monte-Carlo study -- Interface broadening due to mixing during thin film growth at the radiofrequency-powered electrode in a plasma-enhanced chemical vapor deposition environment -- Interface engineering during plasma-enhanced chemical vapor deposition of porous/dense SiN3 optical multilayers.
Uncontrolled Keywords
Plasma (Gaz ionisés); Bombardement ionique; Ellipsométrie; Spectroscopie atomique; Méthode de Monte-Carlo
 Open Access document in PolyPublie |
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| Additional Information: | Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/182040088 |
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| Department: | Département de génie physique |
| Date Deposited: | 04 Aug 2021 11:05 |
| Last Modified: | 25 Aug 2021 14:58 |
| PolyPublie URL: | https://publications.polymtl.ca/7544/ |
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